非(fei)球(qiu)(qiu)面(mian)中心(xin)偏差(cha)的(de)(de)(de)(de)测(ce)(ce)量(liang)手段主要(yao)包括接触式(shi)(百分表)和(he)非(fei)接触式(shi)(光(guang)(guang)学(xue)(xue)传感器(qi))。文(wen)章基于(yu)自准直定(ding)(ding)心(xin)原理和(he)光(guang)(guang)谱共(gong)焦位(wei)移传感技术，对(dui)高(gao)(gao)阶非(fei)球(qiu)(qiu)面(mian)的(de)(de)(de)(de)中心(xin)偏差(cha)进行了(le)非(fei)接触精密测(ce)(ce)量(liang)。光(guang)(guang)学(xue)(xue)加工人员根据测(ce)(ce)量(liang)出的(de)(de)(de)(de)校(xiao)正量(liang)和(he)位(wei)置(zhi)方向(xiang)对(dui)球(qiu)(qiu)面(mian)进行抛光(guang)(guang)，使非(fei)球(qiu)(qiu)面(mian)透镜(jing)的(de)(de)(de)(de)中心(xin)偏差(cha)满足光(guang)(guang)学(xue)(xue)系统(tong)设(she)计的(de)(de)(de)(de)要(yao)求(qiu)。由于(yu)非(fei)球(qiu)(qiu)面(mian)已加工到(dao)一定(ding)(ding)精度(du)要(yao)求(qiu)，因此对(dui)球(qiu)(qiu)面(mian)的(de)(de)(de)(de)抛光(guang)(guang)和(he)磨削是(shi)纠正非(fei)球(qiu)(qiu)面(mian)透镜(jing)中心(xin)偏差(cha)的(de)(de)(de)(de)主要(yao)方法。利用轴(zhou)对(dui)称高(gao)(gao)阶非(fei)球(qiu)(qiu)面(mian)曲线的(de)(de)(de)(de)数学(xue)(xue)模型计算(suan)被测(ce)(ce)环(huan)D带的(de)(de)(de)(de)旋(xuan)转角度(du)θ，即光(guang)(guang)谱共(gong)焦位(wei)移传感器(qi)的(de)(de)(de)(de)工作角。光(guang)(guang)谱共(gong)焦技术可以(yi)测(ce)(ce)量(liang)位(wei)移，利用返(fan)回光(guang)(guang)谱的(de)(de)(de)(de)峰(feng)值波长(zhang)位(wei)置(zhi)。和(he)平区(qu)高(gao)(gao)性能(neng)光(guang)(guang)谱共(gong)焦

光(guang)(guang)(guang)(guang)谱(pu)共(gong)(gong)(gong)焦(jiao)(jiao)(jiao)技(ji)术(shu)(shu)(shu)主要(yao)包括成(cheng)像(xiang)、定(ding)位(wei)和(he)检(jian)测(ce)三(san)个步(bu)骤。首先，通(tong)(tong)过(guo)(guo)(guo)显微镜(jing)对样品(pin)进(jin)行成(cheng)像(xiang)，然后将图像(xiang)传递给计算机进(jin)行处理。接(jie)着，利用算法对图像(xiang)进(jin)行定(ding)位(wei)，以(yi)(yi)确(que)定(ding)样品(pin)的(de)空间位(wei)置。通(tong)(tong)过(guo)(guo)(guo)分(fen)析样品(pin)的(de)光(guang)(guang)(guang)(guang)谱(pu)信(xin)息，实现(xian)对其成(cheng)分(fen)的(de)检(jian)测(ce)。在点(dian)(dian)(dian)(dian)(dian)(dian)胶(jiao)(jiao)(jiao)(jiao)(jiao)行业中(zhong)，光(guang)(guang)(guang)(guang)谱(pu)共(gong)(gong)(gong)焦(jiao)(jiao)(jiao)技(ji)术(shu)(shu)(shu)可(ke)以(yi)(yi)准确(que)地检(jian)测(ce)出点(dian)(dian)(dian)(dian)(dian)(dian)胶(jiao)(jiao)(jiao)(jiao)(jiao)的(de)位(wei)置和(he)尺寸(cun)，确(que)保点(dian)(dian)(dian)(dian)(dian)(dian)胶(jiao)(jiao)(jiao)(jiao)(jiao)的(de)质(zhi)量和(he)精(jing)度(du)。同时，通(tong)(tong)过(guo)(guo)(guo)对点(dian)(dian)(dian)(dian)(dian)(dian)胶(jiao)(jiao)(jiao)(jiao)(jiao)的(de)光(guang)(guang)(guang)(guang)谱(pu)分(fen)析，还(hai)可(ke)以(yi)(yi)了解(jie)到点(dian)(dian)(dian)(dian)(dian)(dian)胶(jiao)(jiao)(jiao)(jiao)(jiao)的(de)成(cheng)分(fen)和(he)性质(zhi)，从而(er)优(you)化(hua)点(dian)(dian)(dian)(dian)(dian)(dian)胶(jiao)(jiao)(jiao)(jiao)(jiao)工(gong)艺。三(san)、光(guang)(guang)(guang)(guang)谱(pu)共(gong)(gong)(gong)焦(jiao)(jiao)(jiao)在点(dian)(dian)(dian)(dian)(dian)(dian)胶(jiao)(jiao)(jiao)(jiao)(jiao)行业中(zhong)的(de)应用提高点(dian)(dian)(dian)(dian)(dian)(dian)胶(jiao)(jiao)(jiao)(jiao)(jiao)质(zhi)量：光(guang)(guang)(guang)(guang)谱(pu)共(gong)(gong)(gong)焦(jiao)(jiao)(jiao)技(ji)术(shu)(shu)(shu)可(ke)以(yi)(yi)有效(xiao)地检(jian)测(ce)点(dian)(dian)(dian)(dian)(dian)(dian)胶(jiao)(jiao)(jiao)(jiao)(jiao)的(de)位(wei)置和(he)尺寸(cun)，避(bi)免(mian)漏点(dian)(dian)(dian)(dian)(dian)(dian)或点(dian)(dian)(dian)(dian)(dian)(dian)胶(jiao)(jiao)(jiao)(jiao)(jiao)过(guo)(guo)(guo)多的(de)问题(ti)。同时，由于其高精(jing)度(du)的(de)检(jian)测(ce)能力，可(ke)以(yi)(yi)确(que)保点(dian)(dian)(dian)(dian)(dian)(dian)胶(jiao)(jiao)(jiao)(jiao)(jiao)的(de)精(jing)确(que)度(du)和(he)一致性。提高点(dian)(dian)(dian)(dian)(dian)(dian)胶(jiao)(jiao)(jiao)(jiao)(jiao)效(xiao)率(lv)：通(tong)(tong)过(guo)(guo)(guo)光(guang)(guang)(guang)(guang)谱(pu)共(gong)(gong)(gong)焦(jiao)(jiao)(jiao)技(ji)术(shu)(shu)(shu)对点(dian)(dian)(dian)(dian)(dian)(dian)胶(jiao)(jiao)(jiao)(jiao)(jiao)的(de)快速检(jian)测(ce)，可(ke)以(yi)(yi)减少后续处理的(de)步(bu)骤和(he)时间，从而(er)提高生产效(xiao)率(lv)。此外，该技(ji)术(shu)(shu)(shu)还(hai)可(ke)以(yi)(yi)有效(xiao)避(bi)免(mian)因(yin)点(dian)(dian)(dian)(dian)(dian)(dian)胶(jiao)(jiao)(jiao)(jiao)(jiao)不良而(er)导致的(de)返(fan)工(gong)和(he)维(wei)修问题(ti)。优(you)化(hua)点(dian)(dian)(dian)(dian)(dian)(dian)胶(jiao)(jiao)(jiao)(jiao)(jiao)工(gong)艺：通(tong)(tong)过(guo)(guo)(guo)对点(dian)(dian)(dian)(dian)(dian)(dian)胶(jiao)(jiao)(jiao)(jiao)(jiao)的(de)光(guang)(guang)(guang)(guang)谱(pu)分(fen)析，可(ke)以(yi)(yi)了解(jie)其成(cheng)分(fen)和(he)性质(zhi)，从而(er)针对不同的(de)材料(liao)和(he)需求优(you)化(hua)点(dian)(dian)(dian)(dian)(dian)(dian)胶(jiao)(jiao)(jiao)(jiao)(jiao)工(gong)艺。例如，根据点(dian)(dian)(dian)(dian)(dian)(dian)胶(jiao)(jiao)(jiao)(jiao)(jiao)的(de)光(guang)(guang)(guang)(guang)谱(pu)特征(zheng)选择合适的(de)胶(jiao)(jiao)(jiao)(jiao)(jiao)水(shui)类型、粘合剂强度(du)以(yi)(yi)及固化(hua)温度(du)等参数。池州高精(jing)度(du)光(guang)(guang)(guang)(guang)谱(pu)共(gong)(gong)(gong)焦(jiao)(jiao)(jiao)光(guang)(guang)(guang)(guang)谱(pu)共(gong)(gong)(gong)焦(jiao)(jiao)(jiao)技(ji)术(shu)(shu)(shu)在航空航天领域(yu)可(ke)以(yi)(yi)用于航空发动机和(he)航天器(qi)部件的(de)精(jing)度(du)检(jian)测(ce)。

光谱(pu)共焦位(wei)移传(chuan)感器在金属(shu)(shu)内(nei)壁(bi)(bi)轮廓(kuo)扫描测(ce)量(liang)(liang)中具有大(da)量(liang)(liang)的(de)(de)应用，以(yi)(yi)(yi)下是(shi)几种典型应用：尺寸测(ce)量(liang)(liang)利用光谱(pu)共焦位(wei)移传(chuan)感器可(ke)(ke)以(yi)(yi)(yi)精(jing)(jing)确地测(ce)量(liang)(liang)金属(shu)(shu)内(nei)壁(bi)(bi)的(de)(de)尺寸，如(ru)直径、圆度(du)等。通(tong)过测(ce)量(liang)(liang)内(nei)壁(bi)(bi)不(bu)同位(wei)置的(de)(de)直径，可(ke)(ke)以(yi)(yi)(yi)评估(gu)内(nei)壁(bi)(bi)的(de)(de)形(xing)变(bian)和(he)(he)扭(niu)曲程度(du)，进而评估(gu)加工(gong)质(zhi)量(liang)(liang)。表(biao)面(mian)形(xing)貌测(ce)量(liang)(liang)光谱(pu)共焦位(wei)移传(chuan)感器可(ke)(ke)以(yi)(yi)(yi)高精(jing)(jing)度(du)地测(ce)量(liang)(liang)金属(shu)(shu)内(nei)壁(bi)(bi)的(de)(de)表(biao)面(mian)形(xing)貌，如(ru)粗糙度(du)、峰谷分布等。通(tong)过对表(biao)面(mian)形(xing)貌数据进行处理和(he)(he)分析，可(ke)(ke)以(yi)(yi)(yi)评估(gu)加工(gong)表(biao)面(mian)的(de)(de)质(zhi)量(liang)(liang)，进而优化加工(gong)参数和(he)(he)提(ti)高加工(gong)效率。

光(guang)(guang)(guang)谱(pu)(pu)(pu)共(gong)焦(jiao)(jiao)测量技术(shu)是共(gong)焦(jiao)(jiao)原理和编码技术(shu)的(de)(de)融合。一个完(wan)整的(de)(de)相对(dui)高度范(fan)畴能够(gou)通过(guo)使用白光(guang)(guang)(guang)灯灯源照明灯具(ju)和光(guang)(guang)(guang)谱(pu)(pu)(pu)仪(yi)完(wan)成(cheng)精确测量。光(guang)(guang)(guang)谱(pu)(pu)(pu)共(gong)焦(jiao)(jiao)位移传(chuan)感器的(de)(de)精确测量原理如下图(tu)1所显示，灯源发出光(guang)(guang)(guang)经过(guo)光(guang)(guang)(guang)纤，再通过(guo)超色(se)(se)差(cha)(cha)镜(jing)片(pian)(pian)，超色(se)(se)差(cha)(cha)镜(jing)片(pian)(pian)能够(gou)聚(ju)焦(jiao)(jiao)在直线光(guang)(guang)(guang)轴上，产生(sheng)一系列可见光(guang)(guang)(guang)聚(ju)焦(jiao)(jiao)点。这种(zhong)可见光(guang)(guang)(guang)聚(ju)焦(jiao)(jiao)点是连续(xu)的(de)(de)，不重合的(de)(de)。当(dang)待测物放置检测范(fan)围内时，只(zhi)有(you)一种(zhong)光(guang)(guang)(guang)波(bo)长(zhang)能够(gou)聚(ju)焦(jiao)(jiao)在待测物表层并反射面(mian)，依(yi)据激光(guang)(guang)(guang)光(guang)(guang)(guang)路的(de)(de)可逆(ni)回(hui)到光(guang)(guang)(guang)谱(pu)(pu)(pu)仪(yi)，产生(sheng)波(bo)峰焊。全部别(bie)的(de)(de)波(bo)长(zhang)也(ye)将失去焦(jiao)(jiao)点。运用单频(pin)干涉仪(yi)的(de)(de)校准信息(xi)计(ji)算(suan)待测物体的(de)(de)部位，创建光(guang)(guang)(guang)谱(pu)(pu)(pu)峰处波(bo)长(zhang)偏移的(de)(de)编号。该超色(se)(se)差(cha)(cha)镜(jing)片(pian)(pian)通过(guo)提升(sheng)，具(ju)备比较大的(de)(de)纵向色(se)(se)差(cha)(cha)，用以在径(jing)向分离(li)出来电(dian)子光(guang)(guang)(guang)学信号的(de)(de)光(guang)(guang)(guang)谱(pu)(pu)(pu)成(cheng)份。因(yin)而，超色(se)(se)差(cha)(cha)镜(jing)片(pian)(pian)是传(chuan)感器关(guan)键部件，其设(she)计(ji)方案尤为重要。光(guang)(guang)(guang)谱(pu)(pu)(pu)共(gong)焦(jiao)(jiao)技术(shu)具(ju)有(you)精度高、效(xiao)率高等(deng)优点。

光(guang)(guang)(guang)谱(pu)共(gong)(gong)焦(jiao)(jiao)(jiao)传(chuan)(chuan)感(gan)(gan)(gan)(gan)(gan)器(qi)(qi)(qi)(qi)(qi)(qi)作(zuo)为一种新型(xing)高(gao)精(jing)密传(chuan)(chuan)感(gan)(gan)(gan)(gan)(gan)器(qi)(qi)(qi)(qi)(qi)(qi)，其测(ce)(ce)(ce) 量(liang)精(jing)密度(du)(du)(du)可达(da) 土 0.02%。开始(shi)产生在法(fa)国(guo)的(de)(de)，相(xiang)(xiang)较于(yu)光(guang)(guang)(guang)栅尺(chi)、容栅 或(huo)电(dian)感(gan)(gan)(gan)(gan)(gan)器(qi)(qi)(qi)(qi)(qi)(qi)电(dian)台广播、电(dian)感(gan)(gan)(gan)(gan)(gan)器(qi)(qi)(qi)(qi)(qi)(qi)差(cha)动(dong)变压器(qi)(qi)(qi)(qi)(qi)(qi)式偏(pian)移(yi)(yi)(yi)传(chuan)(chuan)感(gan)(gan)(gan)(gan)(gan)器(qi)(qi)(qi)(qi)(qi)(qi)，其在偏(pian)移(yi)(yi)(yi)测(ce)(ce)(ce)量(liang)方面(mian)的(de)(de)优势更(geng)加明(ming)显。现如今(jin)，因为光(guang)(guang)(guang)谱(pu)共(gong)(gong)焦(jiao)(jiao)(jiao)传(chuan)(chuan)感(gan)(gan)(gan)(gan)(gan)器(qi)(qi)(qi)(qi)(qi)(qi)拥(yong)有高(gao)精(jing)密、，因而，其在几(ji)何(he)量(liang)高(gao)精(jing)密测(ce)(ce)(ce)量(liang)层面(mian)的(de)(de)应用愈来(lai)愈普(pu)遍，如漫(man)反射光(guang)(guang)(guang)及平面(mian)图(tu)反射面(mian)的(de)(de)偏(pian)移(yi)(yi)(yi)测(ce)(ce)(ce)量(liang)、平整(zheng)度(du)(du)(du)测(ce)(ce)(ce)量(liang)、塑料薄膜及透明(ming)材料薄厚测(ce)(ce)(ce)量(liang)、外表粗糙度(du)(du)(du)测(ce)(ce)(ce)量(liang)等(deng)。在偏(pian)移(yi)(yi)(yi)测(ce)(ce)(ce)量(liang)层面(mian)，自光(guang)(guang)(guang)谱(pu)共(gong)(gong)焦(jiao)(jiao)(jiao)传(chuan)(chuan)感(gan)(gan)(gan)(gan)(gan)器(qi)(qi)(qi)(qi)(qi)(qi)面(mian)世至今(jin)，它(ta)基(ji)本功能就(jiu)是测(ce)(ce)(ce)量(liang)偏(pian)移(yi)(yi)(yi)。马敬等(deng)对(dui)光(guang)(guang)(guang)谱(pu)共(gong)(gong)焦(jiao)(jiao)(jiao)传(chuan)(chuan)感(gan)(gan)(gan)(gan)(gan)器(qi)(qi)(qi)(qi)(qi)(qi)的(de)(de)散(san)射目镜进行(xing)(xing)分析，制定了(le)散(san)射目镜的(de)(de)构造(zao)，提(ti)升了(le)光(guang)(guang)(guang)谱(pu)共(gong)(gong)焦(jiao)(jiao)(jiao)传(chuan)(chuan)感(gan)(gan)(gan)(gan)(gan)器(qi)(qi)(qi)(qi)(qi)(qi)的(de)(de)各项特性；毕 超(chao) 等(deng) 利(li) 用光(guang)(guang)(guang)谱(pu)共(gong)(gong)焦(jiao)(jiao)(jiao)传(chuan)(chuan)感(gan)(gan)(gan)(gan)(gan)器(qi)(qi)(qi)(qi)(qi)(qi)完成了(le)对(dui)飞(fei)机发动(dong)机电(dian)机转子(zi)叶子(zi)空隙的(de)(de)高(gao)精(jing)密、高(gao)效率的(de)(de)测(ce)(ce)(ce)量(liang)。在平整(zheng)度(du)(du)(du)测(ce)(ce)(ce)量(liang)层面(mian)，位恒(heng)政等(deng)对(dui)光(guang)(guang)(guang)谱(pu)共(gong)(gong)焦(jiao)(jiao)(jiao)传(chuan)(chuan)感(gan)(gan)(gan)(gan)(gan)器(qi)(qi)(qi)(qi)(qi)(qi)的(de)(de)检(jian)测(ce)(ce)(ce)误(wu)差(cha)进行(xing)(xing)分析，在其中，对(dui)其平面(mian)图(tu)检(jian)测(ce)(ce)(ce)误(wu)差(cha)科(ke)学研(yan)究时，利(li)用光(guang)(guang)(guang)谱(pu)共(gong)(gong)焦(jiao)(jiao)(jiao)传(chuan)(chuan)感(gan)(gan)(gan)(gan)(gan)器(qi)(qi)(qi)(qi)(qi)(qi)对(dui)圆平晶(jing)的(de)(de)平整(zheng)度(du)(du)(du)开展测(ce)(ce)(ce)量(liang)，获得了(le)平面(mian)图(tu)检(jian)测(ce)(ce)(ce)误(wu)差(cha)值。光(guang)(guang)(guang)谱(pu)共(gong)(gong)焦(jiao)(jiao)(jiao)技术的(de)(de)研(yan)究对(dui)于(yu)相(xiang)(xiang)关行(xing)(xing)业(ye)的(de)(de)发展具有重要意(yi)义。宝鸡(ji)推荐光(guang)(guang)(guang)谱(pu)共(gong)(gong)焦(jiao)(jiao)(jiao)

光谱共焦位(wei)移(yi)传(chuan)感器可以实时监测(ce)材料(liao)的变化情况，对于研究(jiu)材料(liao)的力学性能具(ju)有重要意义。和平区高性能光谱共焦

在(zai)(zai)容器玻璃(li)的(de)生(sheng)产(chan)过程中(zhong)，瓶(ping)子的(de)圆(yuan)度和(he)壁厚(hou)(hou)是(shi)重要(yao)(yao)的(de)质量(liang)(liang)特征。因此(ci)，必须检查这(zhei)(zhei)些参数。任何有缺陷的(de)容器都会立即被拒绝并(bing)返回到玻璃(li)熔体中(zhong)。高处理速(su)度与防止损坏(huai)瓶(ping)子的(de)需要(yao)(yao)相结合(he)，需要(yao)(yao)快(kuai)速(su)的(de)非接触式测量(liang)(liang)程序。而光(guang)谱共焦传感器适合(he)这(zhei)(zhei)项测量(liang)(liang)任务。该系统在(zai)(zai)两个点(dian)上同步测量(liang)(liang)。数据通(tong)过 EtherCAT 接口实(shi)时输出，厚(hou)(hou)度校准功能(neng)允许在(zai)(zai)传感器的(de)整个测量(liang)(liang)范围(wei)内(nei)进(jin)行(xing)精确的(de)厚(hou)(hou)度测量(liang)(liang)。无论玻璃(li)颜色如(ru)何，自(zi)动曝(pu)光(guang)控(kong)制都可以实(shi)现稳定(ding)的(de)测量(liang)(liang)。和(he)平区(qu)高性能(neng)光(guang)谱共焦

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