【溅(jian)镀(du)工(gong)艺的(de)(de)原理】以(yi)几(ji)十(shi)电(dian)(dian)(dian)(dian)子(zi)(zi)(zi)伏特或更高(gao)(gao)动能的(de)(de)荷电(dian)(dian)(dian)(dian)粒子(zi)(zi)(zi)轰(hong)击材(cai)(cai)(cai)料表面，使其溅(jian)射出进入气相，可(ke)(ke)用来刻蚀和镀(du)膜。入射一(yi)个(ge)离(li)(li)子(zi)(zi)(zi)所溅(jian)射出的(de)(de)原子(zi)(zi)(zi)个(ge)数称为溅(jian)射产(chan)额(e)(Yield)产(chan)额(e)越高(gao)(gao)溅(jian)射速度(du)(du)越快，以(yi)Cu,Au,Ag等高(gao)(gao)，Ti,Mo,Ta,W等低(di)。一(yi)般在0.1-10原子(zi)(zi)(zi)/离(li)(li)子(zi)(zi)(zi)。离(li)(li)子(zi)(zi)(zi)可(ke)(ke)以(yi)直流辉(hui)光(guang)放电(dian)(dian)(dian)(dian)(glowdischarge)产(chan)生，在10-1—10Pa真空(kong)度(du)(du)，在两极间加高(gao)(gao)压产(chan)生放电(dian)(dian)(dian)(dian)，正(zheng)离(li)(li)子(zi)(zi)(zi)会轰(hong)击负电(dian)(dian)(dian)(dian)之靶材(cai)(cai)(cai)而溅(jian)射也(ye)靶材(cai)(cai)(cai)，而镀(du)至(zhi)被镀(du)物(wu)上。正(zheng)常辉(hui)光(guang)放电(dian)(dian)(dian)(dian)(glowdischarge)的(de)(de)电(dian)(dian)(dian)(dian)流密度(du)(du)与阴(yin)极物(wu)质与形状(zhuang)、气体种类压力等有关。溅(jian)镀(du)时应尽可(ke)(ke)能维(wei)持其稳定(ding)。任何材(cai)(cai)(cai)料皆(jie)可(ke)(ke)溅(jian)射镀(du)膜，即使高(gao)(gao)熔点材(cai)(cai)(cai)料也(ye)容(rong)易溅(jian)镀(du)，但(dan)对(dui)非导体靶材(cai)(cai)(cai)须(xu)以(yi)射频(pin)（RF）或脉冲（pulse）溅(jian)射；且因导电(dian)(dian)(dian)(dian)性较差，溅(jian)镀(du)功率及速度(du)(du)较低(di)。金属溅(jian)镀(du)功率可(ke)(ke)达10W/cm2,非金属＜5W/cm2。真空(kong)镀(du)膜机的(de)(de)产(chan)业集群。河北真空(kong)镀(du)膜机多少(shao)钱(qian)

【真(zhen)空(kong)镀(du)(du)膜之磁(ci)控(kong)溅(jian)(jian)(jian)射(she)(she)(she)】在阴(yin)极靶(ba)表面(mian)形(xing)成一正(zheng)交电磁(ci)场(chang)，在此(ci)区电子(zi)密(mi)度(du)高(gao)，进而提高(gao)离子(zi)密(mi)度(du)，使得溅(jian)(jian)(jian)镀(du)(du)率(lv)提高(gao)(一个数量级)，溅(jian)(jian)(jian)射(she)(she)(she)速度(du)可(ke)达0.1—1 um/min膜层(ceng)附着(zhe)力(li)较蒸镀(du)(du)佳，是(shi)目(mu)前实(shi)用(yong)的镀(du)(du)膜技(ji)术(shu)(shu)之一。其它有偏(pian)压溅(jian)(jian)(jian)射(she)(she)(she)、反应(ying)溅(jian)(jian)(jian)射(she)(she)(she)、离子(zi)束溅(jian)(jian)(jian)射(she)(she)(she)等镀(du)(du)膜技(ji)术(shu)(shu) 溅(jian)(jian)(jian)镀(du)(du)机(ji)(ji)(ji)设备与工艺(yi)溅(jian)(jian)(jian)镀(du)(du)机(ji)(ji)(ji)由真(zhen)空(kong)室，排气系(xi)统，溅(jian)(jian)(jian)射(she)(she)(she)源和(he)控(kong)制系(xi)统组成。溅(jian)(jian)(jian)射(she)(she)(she)源又分为(wei)电源和(he)溅(jian)(jian)(jian)射(she)(she)(she)qiang（sputter gun）。磁(ci)控(kong)溅(jian)(jian)(jian)射(she)(she)(she)qiang分为(wei)平(ping)面(mian)型(xing)(xing)和(he)圆柱型(xing)(xing)，其中平(ping)面(mian)型(xing)(xing)分为(wei)矩型(xing)(xing)和(he)圆型(xing)(xing)，靶(ba)材料利用(yong)率(lv)30- 40%，圆柱型(xing)(xing)靶(ba)材料利用(yong)率(lv)>50% 溅(jian)(jian)(jian)射(she)(she)(she)电源分为(wei)：直(zhi)流（DC）、射(she)(she)(she)频（RF）、脉冲（pulse）， 直(zhi)流：800-1000V（Max）导(dao)(dao)体(ti)用(yong)，须可(ke)灾(zai)弧(hu)。 射(she)(she)(she)频：13.56MHZ，非导(dao)(dao)体(ti)用(yong)。 脉冲：泛用(yong)，新发展出(chu)上海真(zhen)空(kong)镀(du)(du)膜机(ji)(ji)(ji)品牌PVD真(zhen)空(kong)镀(du)(du)膜机(ji)(ji)(ji)的公司。

【真(zhen)(zhen)(zhen)(zhen)空(kong)镀(du)膜(mo)(mo)的(de)(de)(de)分(fen)类(lei)(lei)】真(zhen)(zhen)(zhen)(zhen)空(kong)镀(du)膜(mo)(mo)的(de)(de)(de)镀(du)层结构(gou)一(yi)(yi)(yi)般(ban)为(wei)(wei)(wei)：基材(cai)(cai)、底漆(qi)、真(zhen)(zhen)(zhen)(zhen)空(kong)膜(mo)(mo)层、面(mian)漆(qi)，因靶材(cai)(cai)理化特(te)(te)性(xing)直接决定膜(mo)(mo)层的(de)(de)(de)特(te)(te)性(xing)，根据(ju)膜(mo)(mo)层的(de)(de)(de)导(dao)电(dian)与(yu)否，可(ke)分(fen)为(wei)(wei)(wei)导(dao)电(dian)真(zhen)(zhen)(zhen)(zhen)空(kong)镀(du)膜(mo)(mo)（VM）和不(bu)导(dao)电(dian)真(zhen)(zhen)(zhen)(zhen)空(kong)镀(du)膜(mo)(mo)（NCVM）两种(zhong)。VM：一(yi)(yi)(yi)般(ban)用(yong)(yong)在化妆品类(lei)(lei)、NB类(lei)(lei)、3C类(lei)(lei)、汽配类(lei)(lei)按(an)(an)键(jian)、装(zhuang)(zhuang)饰(shi)框、按(an)(an)键(jian)RING类(lei)(lei)饰(shi)品的(de)(de)(de)表(biao)面(mian)处理，其(qi)表(biao)面(mian)效果(guo)与(yu)水(shui)电(dian)镀(du)相媲美，靶材(cai)(cai)一(yi)(yi)(yi)般(ban)为(wei)(wei)(wei)铝、铜(tong)、锡、金(jin)(jin)、银等。NCVM：具有金(jin)(jin)属(shu)质感、透明，但不(bu)导(dao)电(dian)，一(yi)(yi)(yi)般(ban)用(yong)(yong)在通讯类(lei)(lei)、3C类(lei)(lei)对抗扰要(yao)较高的(de)(de)(de)机壳、装(zhuang)(zhuang)饰(shi)框、按(an)(an)键(jian)件、RING类(lei)(lei)饰(shi)品的(de)(de)(de)表(biao)面(mian)处理，其(qi)表(biao)面(mian)效果(guo)为(wei)(wei)(wei)水(shui)电(dian)镀(du)不(bu)可(ke)取代，靶材(cai)(cai)一(yi)(yi)(yi)般(ban)为(wei)(wei)(wei)铟、铟锡。三、扩散(san)泵(beng)连续(xu)使用(yong)(yong)6个(ge)月(yue)以上，抽的(de)(de)(de)速度会显(xian)然变(bian)慢，当操作(zuo)不(bu)当应拆去联结水(shui)管(guan)，卸下电(dian)炉(lu)盘，将(jiang)一(yi)(yi)(yi)级喷嘴拧出，先用(yong)(yong)汽油将(jiang)泵(beng)腔(qiang)及泵(beng)胆清洗一(yi)(yi)(yi)遍，再(zai)用(yong)(yong)洗衣粉兑水(shui)清洗一(yi)(yi)(yi)遍，然后用(yong)(yong)清水(shui)彻底清洗干净，待水(shui)份挥发干以后，装(zhuang)(zhuang)好(hao)泵(beng)胆，加入(ru)新(xin)扩散(san)泵(beng)油，并装(zhuang)(zhuang)回机体(ti)，接好(hao)水(shui)管(guan)，装(zhuang)(zhuang)好(hao)电(dian)炉(lu)盘，便(bian)可(ke)以重新(xin)开(kai)机。在重新(xin)开(kai)机前(qian)，要(yao)注意检漏工作(zuo)。

【真(zhen)空(kong)(kong)(kong)镀(du)膜设备(bei)之(zhi)真(zhen)空(kong)(kong)(kong)的(de)(de)获(huo)得】： 真(zhen)空(kong)(kong)(kong)泵(beng)(beng)(beng)(beng)(beng)(beng)(beng)：真(zhen)空(kong)(kong)(kong)泵(beng)(beng)(beng)(beng)(beng)(beng)(beng)是(shi)指利用(yong)(yong)机(ji)械(xie)、物理(li)、化学或物理(li)化学的(de)(de)方法(fa)对被抽(chou)容器(qi)进行(xing)抽(chou)气(qi)而获(huo)得真(zhen)空(kong)(kong)(kong)的(de)(de)器(qi)件或设备(bei)。通俗来讲(jiang)，真(zhen)空(kong)(kong)(kong)泵(beng)(beng)(beng)(beng)(beng)(beng)(beng)是(shi)用(yong)(yong)各种方法(fa)在某(mou)一(yi)封闭空(kong)(kong)(kong)间中改善、产生和(he)维持真(zhen)空(kong)(kong)(kong)的(de)(de)装(zhuang)置(zhi)。 按真(zhen)空(kong)(kong)(kong)泵(beng)(beng)(beng)(beng)(beng)(beng)(beng)的(de)(de)工作(zuo)原(yuan)理(li)，真(zhen)空(kong)(kong)(kong)泵(beng)(beng)(beng)(beng)(beng)(beng)(beng)基本上可(ke)以分为(wei)两(liang)种类型，即气(qi)体捕集泵(beng)(beng)(beng)(beng)(beng)(beng)(beng)和(he)气(qi)体传输泵(beng)(beng)(beng)(beng)(beng)(beng)(beng)。其广(guang)fan用(yong)(yong)于冶金、化工、食品、电子镀(du)膜等行(xing)业。 A、粗真(zhen)空(kong)(kong)(kong)泵(beng)(beng)(beng)(beng)(beng)(beng)(beng)（Rough Vacuum Pump）：一(yi)般用(yong)(yong)于抽(chou)粗真(zhen)空(kong)(kong)(kong)，有油泵(beng)(beng)(beng)(beng)(beng)(beng)(beng)和(he) 干泵(beng)(beng)(beng)(beng)(beng)(beng)(beng)。从结构上可(ke)分几种： 旋(xuan)(xuan)转(zhuan)叶片泵(beng)(beng)(beng)(beng)(beng)(beng)(beng)：油泵(beng)(beng)(beng)(beng)(beng)(beng)(beng)，极(ji)限(xian)真(zhen)空(kong)(kong)(kong)可(ke)达10&3Torr，抽(chou)速(su)1~650CFM 隔膜泵(beng)(beng)(beng)(beng)(beng)(beng)(beng)：干泵(beng)(beng)(beng)(beng)(beng)(beng)(beng)，极(ji)限(xian)真(zhen)空(kong)(kong)(kong)1Torr左右，抽(chou)速(su)<10CFM 往复式(shi)活塞泵(beng)(beng)(beng)(beng)(beng)(beng)(beng)：干泵(beng)(beng)(beng)(beng)(beng)(beng)(beng)，极(ji)限(xian)真(zhen)空(kong)(kong)(kong)10&2Torr，抽(chou)速(su)6~32CFM 涡旋(xuan)(xuan)式(shi)真(zhen)空(kong)(kong)(kong)泵(beng)(beng)(beng)(beng)(beng)(beng)(beng)：干泵(beng)(beng)(beng)(beng)(beng)(beng)(beng)，极(ji)限(xian)真(zhen)空(kong)(kong)(kong)10&2Torr，抽(chou)速(su)12~25CFM 螺(luo)旋(xuan)(xuan)泵(beng)(beng)(beng)(beng)(beng)(beng)(beng)：干泵(beng)(beng)(beng)(beng)(beng)(beng)(beng)，极(ji)限(xian)真(zhen)空(kong)(kong)(kong)10&3Torr，抽(chou)速(su)30~318CFM真(zhen)空(kong)(kong)(kong)镀(du)膜机(ji)的(de)(de)应用(yong)(yong)领域。

【真(zhen)(zhen)(zhen)(zhen)(zhen)空(kong)(kong)镀(du)(du)膜机(ji)镀(du)(du)塑(su)料件时(shi)抽(chou)真(zhen)(zhen)(zhen)(zhen)(zhen)空(kong)(kong)时(shi)间过(guo)(guo)长(zhang)(zhang)是(shi)什么原因？】 (1) 真(zhen)(zhen)(zhen)(zhen)(zhen)空(kong)(kong)室(shi)(shi)(shi)有(you)漏(lou)(lou)气(qi)(qi)现象(xiang)(xiang)：da家都(dou)(dou)知道(dao)，真(zhen)(zhen)(zhen)(zhen)(zhen)空(kong)(kong)蒸发镀(du)(du)膜机(ji)是(shi)的(de)基本(ben)条(tiao)件是(shi)工(gong)件在真(zhen)(zhen)(zhen)(zhen)(zhen)空(kong)(kong)状态下才能(neng)进(jin)行镀(du)(du)膜加工(gong)的(de)，若真(zhen)(zhen)(zhen)(zhen)(zhen)空(kong)(kong)室(shi)(shi)(shi)有(you)漏(lou)(lou)气(qi)(qi)现象(xiang)(xiang)而没有(you)经过(guo)(guo)检漏(lou)(lou)找出漏(lou)(lou)气(qi)(qi)位置，则(ze)真(zhen)(zhen)(zhen)(zhen)(zhen)空(kong)(kong)镀(du)(du)很长(zhang)(zhang)时(shi)间都(dou)(dou)不(bu)能(neng)抽(chou)得上来的(de)；(2)即使真(zhen)(zhen)(zhen)(zhen)(zhen)空(kong)(kong)室(shi)(shi)(shi)没有(you)漏(lou)(lou)气(qi)(qi)，因为塑(su)料产(chan)(chan)品的(de)放(fang)气(qi)(qi)量da，所以抽(chou)真(zhen)(zhen)(zhen)(zhen)(zhen)空(kong)(kong)，特别(bie)是(shi)高(gao)真(zhen)(zhen)(zhen)(zhen)(zhen)空(kong)(kong)很难达到。真(zhen)(zhen)(zhen)(zhen)(zhen)空(kong)(kong)室(shi)(shi)(shi)内(nei)太脏放(fang)气(qi)(qi)，而且由(you)于(yu)塑(su)料产(chan)(chan)品的(de)放(fang)气(qi)(qi)，造成真(zhen)(zhen)(zhen)(zhen)(zhen)空(kong)(kong)室(shi)(shi)(shi)内(nei)镀(du)(du)膜气(qi)(qi)体(ti)的(de)不(bu)纯(chun)，有(you)杂气(qi)(qi)的(de)存在，造成镀(du)(du)膜产(chan)(chan)品的(de)颜色发暗，发黄，发黑等(deng)。 （3）也许是(shi)真(zhen)(zhen)(zhen)(zhen)(zhen)空(kong)(kong)机(ji)组的(de)抽(chou)气(qi)(qi)能(neng)力不(bu)够(gou)了，油被污染或氧化了。 （4）真(zhen)(zhen)(zhen)(zhen)(zhen)空(kong)(kong)室(shi)(shi)(shi)有(you)漏(lou)(lou)水。 （5）抽(chou)空(kong)(kong)管道(dao)有(you)漏(lou)(lou)气(qi)(qi)。真(zhen)(zhen)(zhen)(zhen)(zhen)空(kong)(kong)镀(du)(du)膜机(ji)参数(shu)怎(zen)么调？河北真(zhen)(zhen)(zhen)(zhen)(zhen)空(kong)(kong)镀(du)(du)膜机(ji)多少钱

真(zhen)空(kong)镀膜机的(de)升(sheng)级改(gai)造(zao)。河北真(zhen)空(kong)镀膜机多少钱

现有(you)(you)(you)(you)的(de)真(zhen)空(kong)镀(du)(du)(du)膜(mo)机，主(zhu)要用于一些放(fang)气量较少的(de)普通(tong)玻(bo)璃(li)(li)上镀(du)(du)(du)膜(mo)，由于大(da)面积(ji)有(you)(you)(you)(you)机玻(bo)璃(li)(li)放(fang)气量较大(da)，热变形温度低，刚性低，因此(ci)现有(you)(you)(you)(you)的(de)真(zhen)空(kong)镀(du)(du)(du)膜(mo)机无(wu)法(fa)(fa)镀(du)(du)(du)制大(da)面积(ji)有(you)(you)(you)(you)机玻(bo)璃(li)(li)。现有(you)(you)(you)(you)的(de)镀(du)(du)(du)膜(mo)机蒸发源间(jian)呈(cheng)正方形分布，这(zhei)样镀(du)(du)(du)出的(de)膜(mo)层(ceng)均匀性差，无(wu)法(fa)(fa)保(bao)证大(da)面积(ji)有(you)(you)(you)(you)机玻(bo)璃(li)(li)在镀(du)(du)(du)制过程中(zhong)不变形。为(wei)了克(ke)服现有(you)(you)(you)(you)技术之不足，提供一种(zhong)真(zhen)空(kong)镀(du)(du)(du)膜(mo)系(xi)(xi)统，本系(xi)(xi)统由真(zhen)空(kong)镀(du)(du)(du)膜(mo)系(xi)(xi)统和真(zhen)空(kong)手套(tao)箱系(xi)(xi)统集(ji)成而成，可在高真(zhen)空(kong)蒸镀(du)(du)(du)腔(qiang)室中(zhong)完成薄膜(mo)蒸镀(du)(du)(du)，并(bing)在手套(tao)箱高纯(chun)惰(duo)性气体氛围下进(jin)行(xing)样品(pin)(pin)的(de)存放(fang)、制备以及蒸镀(du)(du)(du)后样品(pin)(pin)的(de)检测。河(he)北真(zhen)空(kong)镀(du)(du)(du)膜(mo)机多少钱

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